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Highly transparent ITO thin films on photosensitive glass: sol-gel synthesis, structure, morphology and optical properties

Identifieur interne : 001A68 ( Main/Repository ); précédent : 001A67; suivant : 001A69

Highly transparent ITO thin films on photosensitive glass: sol-gel synthesis, structure, morphology and optical properties

Auteurs : RBID : Pascal:12-0258785

Descripteurs français

Pascal (Inist)
- Procédé sol gel, Microstructure, Transparence, Dépôt centrifugation, Microscopie électronique balayage, Spectre UV visible, Spectre photoélectron RX, Ellipsométrie spectroscopique, Etain Indium Oxyde Mixte, Revêtement antiréfléchissant, Revêtement optique, Couche mince, Verre photosensible, Réseau cubique, 7866L.

English descriptors

KwdEn :
- Antireflection coatings, Cubic lattices, Microstructure, Optical coatings, Photosensitive glass, Scanning electron microscopy, Sol-gel process, Spectroscopic ellipsometry, Spin-on coating, Thin films, Tin Indium Oxides Mixed, Transparency, Ultraviolet visible spectrum, X-ray photoelectron spectra.

Abstract

Conductive and highly transparent indium tin oxide (ITO) thin films were prepared on photosensitive glass substrates by the combination of sol-gel and spin-coating techniques. First, the substrates were coated with amorphous Sn-doped indium hydroxide, and these amorphous films were then calcined at 550°C to produce crystalline and electrically conductive ITO layers. The resulting thin films were characterized by means of scanning electron microscopy, UV-Vis spectroscopy, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. The measurements revealed that the ITO films were composed of spherical crystallites around 20 nm in size with mainly cubic crystal structure. The ITO films acted as antireflection coatings increasing the transparency of the coated substrates compared to that of the bare supports. The developed ITO films with a thickness of ˜170-330 nm were highly transparent in the visible spectrum with sheet resistances of 4.0-13.7 kΩ/sq. By coating photosensitive glass with ITO films, our results open up new perspectives in micro- and nano-technology, for example in fabricating conductive and highly transparent 3D microreactors.

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Le document en format XML

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<author><name sortKey="Beke, Szabolcs" uniqKey="Beke S">Szabolcs Beke</name>
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<author><name sortKey="Agocs, Emil" uniqKey="Agocs E">Emil Agocs</name>
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<author><name sortKey="Dekany, Imre" uniqKey="Dekany I">Imre Dekany</name>
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<term>Scanning electron microscopy</term>
<term>Sol-gel process</term>
<term>Spectroscopic ellipsometry</term>
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<term>Tin Indium Oxides Mixed</term>
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<term>X-ray photoelectron spectra</term>
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<term>Dépôt centrifugation</term>
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<term>Spectre UV visible</term>
<term>Spectre photoélectron RX</term>
<term>Ellipsométrie spectroscopique</term>
<term>Etain Indium Oxyde Mixte</term>
<term>Revêtement antiréfléchissant</term>
<term>Revêtement optique</term>
<term>Couche mince</term>
<term>Verre photosensible</term>
<term>Réseau cubique</term>
<term>7866L</term>
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<front><div type="abstract" xml:lang="en">Conductive and highly transparent indium tin oxide (ITO) thin films were prepared on photosensitive glass substrates by the combination of sol-gel and spin-coating techniques. First, the substrates were coated with amorphous Sn-doped indium hydroxide, and these amorphous films were then calcined at 550°C to produce crystalline and electrically conductive ITO layers. The resulting thin films were characterized by means of scanning electron microscopy, UV-Vis spectroscopy, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. The measurements revealed that the ITO films were composed of spherical crystallites around 20 nm in size with mainly cubic crystal structure. The ITO films acted as antireflection coatings increasing the transparency of the coated substrates compared to that of the bare supports. The developed ITO films with a thickness of ˜170-330 nm were highly transparent in the visible spectrum with sheet resistances of 4.0-13.7 kΩ/sq. By coating photosensitive glass with ITO films, our results open up new perspectives in micro- and nano-technology, for example in fabricating conductive and highly transparent 3D microreactors.</div>
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<fA14 i1="02"><s1>Department of Nanophysics, Italian Institute of Technology, Via Morego 30</s1>
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<fA14 i1="03"><s1>Research Institute for Technical Physics and Materials Science, Konkoly-Thege út 29-33</s1>
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<fC01 i1="01" l="ENG"><s0>Conductive and highly transparent indium tin oxide (ITO) thin films were prepared on photosensitive glass substrates by the combination of sol-gel and spin-coating techniques. First, the substrates were coated with amorphous Sn-doped indium hydroxide, and these amorphous films were then calcined at 550°C to produce crystalline and electrically conductive ITO layers. The resulting thin films were characterized by means of scanning electron microscopy, UV-Vis spectroscopy, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. The measurements revealed that the ITO films were composed of spherical crystallites around 20 nm in size with mainly cubic crystal structure. The ITO films acted as antireflection coatings increasing the transparency of the coated substrates compared to that of the bare supports. The developed ITO films with a thickness of ˜170-330 nm were highly transparent in the visible spectrum with sheet resistances of 4.0-13.7 kΩ/sq. By coating photosensitive glass with ITO films, our results open up new perspectives in micro- and nano-technology, for example in fabricating conductive and highly transparent 3D microreactors.</s0>
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<s5>03</s5>
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<s5>04</s5>
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<s5>08</s5>
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<s5>08</s5>
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<s5>08</s5>
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<s2>NC</s2>
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<s2>NC</s2>
<s2>NA</s2>
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<s5>18</s5>
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<s5>20</s5>
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<s5>20</s5>
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<s4>INC</s4>
<s5>56</s5>
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<fN21><s1>198</s1>
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Highly transparent ITO thin films on photosensitive glass: sol-gel synthesis, structure, morphology and optical properties

Highly transparent ITO thin films on photosensitive glass: sol-gel synthesis, structure, morphology and optical properties

Descripteurs français

English descriptors

Abstract

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Links to Exploration step

Le document en format XML

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